JPH0444362U - - Google Patents

Info

Publication number
JPH0444362U
JPH0444362U JP8638890U JP8638890U JPH0444362U JP H0444362 U JPH0444362 U JP H0444362U JP 8638890 U JP8638890 U JP 8638890U JP 8638890 U JP8638890 U JP 8638890U JP H0444362 U JPH0444362 U JP H0444362U
Authority
JP
Japan
Prior art keywords
plasma
inner tube
tube
annular portion
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8638890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8638890U priority Critical patent/JPH0444362U/ja
Publication of JPH0444362U publication Critical patent/JPH0444362U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP8638890U 1990-08-20 1990-08-20 Pending JPH0444362U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8638890U JPH0444362U (en]) 1990-08-20 1990-08-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8638890U JPH0444362U (en]) 1990-08-20 1990-08-20

Publications (1)

Publication Number Publication Date
JPH0444362U true JPH0444362U (en]) 1992-04-15

Family

ID=31818031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8638890U Pending JPH0444362U (en]) 1990-08-20 1990-08-20

Country Status (1)

Country Link
JP (1) JPH0444362U (en])

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